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MEMS Journals

IEEE/ASME Journal of MEMS
This journal is excellent, unfortunately the editorial board is dominated by North-American. You may have difficulties to get your paper accepted here if you are outside of USA. In 2000, 54% of the submitted papers were accepted.
Sensors and Actuators A
That is the most cited journal in the field. The policy is not very strict and the editors give junior scientists their chance, even if the supervisor is not very famous in the field. The quality has high... and low.
Sensors and Actuators B
Mostly for Chemical Sensor papers, they open a new issue on MicroTAS, the editor is Prof. van den Berg of University Twente. You can submit your microfluidics and Bio-MEMS paper here.
Journal of Micromechanics and Microengineering
A journal of IOP, dominated by European. They offer fast review processes and electronic submission. The quality is average, decreasing with special issue publishing... conference papers.
Smart Materials and Structures
A IOP journal, with editor V. Varadan. If you have paper on sensor, piezoelectric actuators, piezoelectric thin-film, you can submit here.
Microsystem Technologies
A German dominated journal. It favors papers on technology, especially high-aspect ratio technology (LIGA like). Your technology paper can find a place here.
Journal of Microlithography, Microfabrication, and Microsystems
The new (2002) SPIE Journal trying to take some part of the MEMS' paper cake... and has an Asian editor (Taiwan)!
Sensors and Materials
A serious journal edited by Japanese (Editor Sugiyama from Ritsumeikan) but may not be commonly found in library outside Japan...
Journal of Micromechatronics
A new journal, first issue appears in 2000. The journal is dominated by Japanese, so papers from Asia may have good chance. The journal covers all fields of MEMS, but the editor has robotics background. If you have a paper on micro robotics, micro manipulators, this journal is a good place.
Microscale Thermophysical Engineering
A good journal for thermal and fluids people. The Editor is C. L. Tien from Berkeley (the father of Norman Tien of MEMS' fame :-) whose interest is integrated thermal instrumentation. All kinds of experimental and theoretical works on thermal and fluids can be submitted here.
Biomedical microdevices
This is a new journal dedicated to Bio-MEMS. The founding editor is Mauro Ferrari, a young guy from Berkeley. Now he is full professor at Ohio State University. If you are interested in Bio-MEMS, keep an eye on him and this journal.
Biosensors and Bioelectronics
This journal is for Bioengineering people, Bio-MEMS is welcome here.
IEEE Transaction on Biomedical engineering
Bio-MEMS for biomedical application has a good chance here. But bear in mind, the review process of IEEE Transactions is long (it can take 1-2 years...).
IEEE Photonics Technology Letters
An optics related journal with a technology flavor, good for publishing short optical MEMS stuff. As it is a letter, the publication can be quick.
IEEE/OSA Journal of Lightwave Technology
For really serious optical MEMS with more optics than MEMS, you will find this journal quite suitable. However the high quality has a price... publication may be damned slow.

Where to get your MEMS questions answered ?

MEMS material database
with all the properties you want on many MEMS materials - but don't forget to contribute!
SU-8 technology
everything about this ultra-thick negative photoresist
MEMS-Technology
by D. Banks, a nice online introduction to the MEMS technology

University & Federal lab

America

The MEMS Exchange
a US network of MEMS fabrication facility
DARPA (MEMS)
defense agency MEMS research in the US
DARPA (MOEMS)
Sandia Lab - About MEMS
the home of the SummitV process (five layer poly with CMP)
MEMS - UW-Madison
Caltech MEMS Laboratory
U Cornell
where the Cornell NanoFabrication center is - almost no more MEMS there [09/01]...
U of MINNESOTA - MEMS Program
U of L MicroTechnology Center
Bio-MEMS (Ohio State U.)
prevoiously Marc Madou university
UCLA MEMS home page
the gateway to the MEMS in UCLA - Prof. Wu, Kim, Judy and Ho
UCB - Berkeley Sensor & Actuator Center
THE famous BSAC!
UCB - Kris Pister
Univ. of Colorado
all the MEMS at UC - including Prof V. Bright
Carnegie Mellon University
Georgia Tech MEMS
MIT - Microsystems Technology Laboratories
the home of S. Senturia and most MEMS simulation package

Asia

Fujita Lab
at the University of Tokyo, Japan, headed by Prof. H. Fujita and H. Toshiyoshi.
Konishi Laboratory
Ritsumeikan University, Osaka, Japan
Esashi lab
at the Tohoku University in Sendai, Japan

Europe

FZK
in Karlsruhe, Germany
Microsensor & Actuator Technology
at TU-Berlin, Germany, headed by Prof. E. Obermeier
TIMA-CMP Laboratory
in Grenoble, France
SAMLAB (Sensors, Actuators and Microsystems Laboratory)
at the IMT in Neuchatel, CH, headed by Prof. N. de Rooij
Institute of Microsystem (IMS)
at the Swiss Federal Institute of Technology (EPFL) in Lausanne, CH.
MicMec
at the University of Twente, NL, headed by Prof. M. Elwenspoek

Company

IBM Patent-Server
VDI, Germany
ACLARA Biosciences, Inc.
AIP (N. Tien)
Caliper Technologies Inc.
Cepheid (DNA analysis)
Cronos
the home of the MUMPS surface micromachining process
GEMAC - Microsystems
HIMT | Heidelberg Instruments
IntelliSense Corporation
Intersema, innovative pressure sensor technology
InterScience, Inc.
i-STAT (biomed analysis)
Optical Micro-Machines, Inc.
MEMSCAP
MEMS Optical
Mezzosystem (LIGA, X-Ray)
Microparts
LIGA products in Germany
Moritz Design
TRW NovaSensor - pressure
PHS MEMS (Silmag)
Plasma-Therm, Inc.
SensoNor asa
SEYONIC (microfluidic - CH)
SILTRONIX
Silicon wafers
SINTEF ECY Microsystems
Standard MEMS
Surface Technology Systems Limited (STS)
Twente MicroProducts - Microsystems
XactiX - XeF2 etch system

Others

MEMS Clearinghouse
a good MEMS ressource with jobs, news, database, discussion lists...
Asian Technology Information Program
Everything about MEMS!
MEMS -- Stroud Reference Database -- trimmer.net (TM)
Nexus-Emsto
A good list of link to further site...
EPFL MEMS-Links
Semiconductor-Subway
MEMS-Louisville Links
University of Delft MEMS Links
 

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